3D characterization and metrology of nanostructures by electron tomography

E.A. CORONADO

MICROSCOPY & MICROANALYSIS

CAMBRIDGE UNIV PRESS

Lugar: Cambridge; Año: 2008 vol. 14 p. 284 - 284

1431-9276

ere we present some recent results which illustrate the application of STEM based tomography for crystallographic and metrological studies of different kinds of nanostructures. HAADF-STEM tilt series were acquired on a Tecnai F20 microscope, usually in the tilt range of -74º to +74º, using a Fischione ultrahigh-tilt tomography holder, with images recorded every 2º. The images in the tilt series were aligned using the Inspect3D software and reconstructions carried out using the SIRT algorithm. Fig. 1 shows a reconstruction of a Au nanoparticle synthesized by chemical seedmediated growth method. In particular, such noble metal nanoparticles exhibit a plasmon resonancewhich can be tuned with nanoparticle size, shape and dielectric environment, to such an extent that a very small change in their geometry leads to dramatic changes in their optical and electronic properties [3]. STEM tomography allows a very precise 3D description of the particle shape and associated metrological characteri